Available at: https://digitalcommons.calpoly.edu/theses/3119
Date of Award
6-2025
Degree Name
MS in Biomedical Engineering
Department/Program
Biomedical Engineering
College
College of Engineering
Advisor
Benjamin Hawkins
Advisor Department
Biomedical Engineering
Advisor College
College of Engineering
Abstract
This study presents work done to optimize the process parameters to produce interdigitated electrodes on a borosilicate wafer. Using designed experiments and statistical analysis, the error in pattern transfer was minimized using for key process steps including exposure time, develop time and post exposure bake duration. Similarly, statistical analysis was used with profilometry data to fine tune the develop times. Qualitative analysis was used to assess thin film deposition. The resulting process produced wafers with improved pattern transfer and adequate film adhesion