Semi-Automated Oxide Etch System

Author(s) Information

Chloe Dodson, California Polytechnic State University, San Luis ObispoFollow
Andrew Korpela, California Polytechnic State University, San Luis ObispoFollow
Bobby Machado, California Polytechnic State University, San Luis ObispoFollow
Thomas Slayton, California Polytechnic State University, San Luis ObispoFollow

College - Author 1

College of Engineering

Department - Author 1

Mechanical Engineering Department

Degree Name - Author 1

BS in Mechanical Engineering

College - Author 2

College of Engineering

Department - Author 2

Mechanical Engineering Department

Degree - Author 2

BS in Mechanical Engineering

College - Author 3

College of Engineering

Department - Author 3

Mechanical Engineering Department

Degree - Author 3

BS in Mechanical Engineering

College - Author 4

College of Engineering

Department - Author 4

Mechanical Engineering Department

Degree - Author 4

BS in Mechanical Engineering

Date

3-2026

Primary Advisor

John Fabijanic, College of Engineering, Mechanical Engineering Department

Abstract/Summary

This document presents the scope of work for the senior design project titled Semi-Automated Oxide Etch System. This project arose from the need to improve the current method the microfabrication laboratory at Cal Poly uses to lower 100-mm diameter silicon wafers into a hydrofluoric acid solution to remove layers of oxidation. The goal of this project is to create a system where silicon wafers can be safely loaded into a holder and lowered at reliable time and depth increments into hydrofluoric acid. In this scope of work, we will present the relevant background research we have conducted, the specific objectives of our project, and an overview of our current timeline and project management plan.

URL: https://digitalcommons.calpoly.edu/mesp/866