Recommended Citation
United States Patent Number: 6,955,720, October 18, 2005.
NOTE: At the time of publication, the author Richard Savage was not yet affiliated with Cal Poly.
Abstract
An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is positioned in the process chamber. The rotatable chuck has a wafer support surface coated with a coating material. A vacuum supply line is coupled to the rotatable chuck.
Disciplines
Materials Science and Engineering
Number of Pages
11
Publisher statement
Also available from the United States Patent and Trademark Office. Website: http://www.uspto.gov.
Included in
URL: https://digitalcommons.calpoly.edu/mate_fac/89