United States Patent Number: 6,955,720, October 18, 2005. 11 pages. Also available from the United States Patent and Trademark Office. Website: http://www.uspto.gov.
NOTE: At the time of publication, the author Richard Savage was not yet affiliated with Cal Poly.
An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is positioned in the process chamber. The rotatable chuck has a wafer support surface coated with a coating material. A vacuum supply line is coupled to the rotatable chuck.
Materials Science and Engineering