Abstract

An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is positioned in the process chamber. The rotatable chuck has a wafer support surface coated with a coating material. A vacuum supply line is coupled to the rotatable chuck.

Disciplines

Materials Science and Engineering

Number of Pages

11

Publisher statement

Also available from the United States Patent and Trademark Office. Website: http://www.uspto.gov.

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URL: http://digitalcommons.calpoly.edu/mate_fac/89