United States Patent Number: 6,242,364, June 5, 2001.
NOTE: At the time of publication, the author Richard Savage was not yet affiliated with Cal Poly.
An apparatus for delivering a fluidic media to a wafer includes a housing defining a process chamber. A fluidic media delivery member is coupled to the process chamber. A rotatable chuck is positioned in the process chamber. The rotatable chuck has a wafer support surface coated with a coating material. A vacuum supply line is coupled to the rotatable chuck.
Materials Science and Engineering
Number of Pages
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