United States Patent Number: 6,678,093 B1, January 13, 2004.
Optical elements comprise stacked, optically matched and optically coupled etalons, at least one of the optically coupled etalons comprising first and second selectively transparent thin film mirror coatings on opposite surfaces of a bulk optic. The bulk optic defines the cavity spacing of the etalon and may, for example be formed of a monolithic body of silica or other optically transparent glass diced from a glass wafer. The bulk optic may further comprise a wedge coating of progressively increasing thickness overlying the monolithic glass body and compensating for, or offsetting non-parallelism of the bulk optic. The bulk optic may further comprise a thickness-adjustment layer of substantially uniform thickness. The disclosed optical elements optionally comprise other devices optically coupled to the stacked etalons. Novel methods are disclosed for producing the stacked etalons.
Electrical and Computer Engineering
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