Published in Proceedings of International Symposium on Advanced Waste and Emission Management (ResCWE 2000): Nagoya University, Japan, December 4, 2000, pages 1-8.
The management of wastes in the semiconductor and electronics industries requires a multidisciplinary approach that considers the health and safety of employees as well as the treatment and recycling of waste materials. The manufacturing of semiconductor devices requires the use of many toxic chemicals and gases. Air emissions from manufacturing tools must be carefully monitored both inside and outside of the fabrication facility. Liquid effluents must be collected and pretreated before discharge to local wastewater systems. The subsequent use and eventual discard of electronic devices such as television sets and personal computers by consumers has created a new set of recycling and reuse problems. This paper will discuss approaches to the manufacturing and post-consumer disposal of electronic components and devices.
Civil and Environmental Engineering